摘要 |
Disclosed are a piezoelectric substrate and a surface acoustic wave (SAW) filter. A piezoelectric substrate 10a includes a base member 11 including an oxide layer 12 with a plurality of grooves 12a on one surface of the base member 11; a buffer member 13 being formed on the oxide layer 12 to expose one end and another end of the oxide layer 12; an insulating member 14 being formed on another surface of the base member 11; and a piezoelectric member 15 being formed on the buffer member 13. A SAW filter using the piezoelectric substrate 10a, includes the base member 11 including the oxide layer 12 with the plurality of grooves 12a on one surface; the buffer member 13; the insulating member 14; the piezoelectric member 15; and a plurality of interdigital transducer (IDT) electrodes 17 and 17 being formed on the piezoelectric member 15 to receive an electrical signal, filter the electrical signal, and output the filtered electrical signal.
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