发明名称 Piezoelectric substrate and surface acoustic wave filter using the same
摘要 Disclosed are a piezoelectric substrate and a surface acoustic wave (SAW) filter. A piezoelectric substrate 10a includes a base member 11 including an oxide layer 12 with a plurality of grooves 12a on one surface of the base member 11; a buffer member 13 being formed on the oxide layer 12 to expose one end and another end of the oxide layer 12; an insulating member 14 being formed on another surface of the base member 11; and a piezoelectric member 15 being formed on the buffer member 13. A SAW filter using the piezoelectric substrate 10a, includes the base member 11 including the oxide layer 12 with the plurality of grooves 12a on one surface; the buffer member 13; the insulating member 14; the piezoelectric member 15; and a plurality of interdigital transducer (IDT) electrodes 17 and 17 being formed on the piezoelectric member 15 to receive an electrical signal, filter the electrical signal, and output the filtered electrical signal.
申请公布号 US2009224853(A1) 申请公布日期 2009.09.10
申请号 US20080153909 申请日期 2008.05.28
申请人 OH YOUNG JOO 发明人 OH YOUNG JOO
分类号 H03H9/64;H01L41/04;H01L41/22 主分类号 H03H9/64
代理机构 代理人
主权项
地址