Laser element i.e. edge emitting laser diode, manufacturing method, involves partially stripping semiconductor contact layer, which are not covered by mask layer, to manufacture connector waveguide structure

摘要

The method involves providing a semi-conductor layer sequence (15) with an active region (4) suitable to produce electromagnetic radiation in electronic operation of a laser element. An electrical contact layer with an electrode layer is applied on the sequence. An electrically conductive reinforcing element is applied on the electrode layer. A connector like structured mask layer is produced on a subregion of the electrical contact layer. A semiconductor contact layer (7) is partially stripped in regions, which are not covered by the mask layer, to manufacture a connector waveguide structure. An independent claim is also included for a laser element with a connector waveguide structure.