| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning agent for an electronic material having a low forming property and an excellent foam disappearing property, and capable of attaining excellent particle removability and rinsing performance. SOLUTION: This cleaning agent for the electronic material contains an anionic surfactant A comprising one or more cationic components selected from the group comprising an anionic component having specified structure, an alkali metal cation, an alkaline earth metal cation, a 0-25C ammonium cation, and a cation of a specified amine or diamine added with proton, and has 50 mm or less of foaming force of 0.2 wt.% of aqueous solution of the anionic surfactant A measured at 20°C by a Ross-Miles test, and 5 mm or less of foam stability. COPYRIGHT: (C)2009,JPO&INPIT |
