| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve problems in a conventional air conditioner for a clean room having a cooling coil and a reheating heater, that as the cooling is excessively performed by the cooling coil, and a heating amount of the reheating heater is controlled to keep an indoor temperature within a prescribed temperature range, energy is wasted by excessive cooling and reheating. <P>SOLUTION: This air conditioner has a circulation route 4 for sucking the air in a semiconductor manufacturing device 3 and supplying the air to the semiconductor manufacturing device 3 again after passing through a sensible heat exchanger 9, and a CA route 6 for sucking the air (CA) in the clean room, and exhausting the air through the sensible heat exchanger 9, the sensible heat exchanger 9 has a structure to allow the circulated air and CA to intersect with each other without mixed, and the circulated air is cooled by heat exchange between the circulated air and CA. <P>COPYRIGHT: (C)2009,JPO&INPIT |
