| 摘要 |
An electron microscope is provided to prevent the distortion of data measured from detectors by positioning the detectors to the same position. The chamber(100) provides a vacuum space. A sample is loaded on the table formed in the vacuum space. The chamber has a chamber cover. A scanner(200) is connected at the upper part of the chamber and projects electronic beam on the sample. The scanner comprises an electron gun, a column, a condenser lens, an objective lens, a scanning tube and a scan coil. The bottom part of the scanner is connected to a diaphragm(250). The diaphragm is adhered between the condenser lens and the objective lens. The diaphragm is inserted to the scanner and controls the size of image. The vacuum maintaining portion(300) is connected to the chamber and the scanner. A plurality of detectors(400) is connected to the chamber. Each detector includes a sensor.
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