发明名称 Relaxation of a strained layer using a molten layer
摘要 A method for making a crystalline wafer, in which an interface layer is associated with a support substrate. A first layer is associated with the interface layer in a strained state. The interface layer is melted sufficiently to substantially uncouple the first layer from the support substrate to relax the first layer from the strained state to a relaxed state. The interface material is solidified with the first layer in the relaxed state to obtain a first wafer.
申请公布号 US7585792(B2) 申请公布日期 2009.09.08
申请号 US20050052885 申请日期 2005.02.09
申请人 S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES 发明人 CELLER GEORGE K
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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