| 发明名称 |
METHOD AND COMPOSITION FOR REMOVING SODIUM-CONTAINING MATERIAL FROM MICROCIRCUIT SUBSTRATES |
| 摘要 |
A method and composition for removing sodium-containing materials such as photoresist from microcircuit substrate material utilizes 1,2-Diaminocyclohexanetetracarboxylic Acid in an organic solvent.
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| 申请公布号 |
CA2403730(C) |
申请公布日期 |
2009.09.08 |
| 申请号 |
CA20012403730 |
申请日期 |
2001.03.19 |
| 申请人 |
MALLINCKRODT, INC. |
发明人 |
SCHWARTZKOPF, GEORGE |
| 分类号 |
G03F7/42;C11D7/24;C11D7/32;C11D7/34;C11D7/50;C11D11/00;C23G1/06;H01L21/027;H01L21/304;H01L21/311 |
主分类号 |
G03F7/42 |
| 代理机构 |
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代理人 |
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