| 摘要 |
<p>An organic-inorganic complex superlattice film and a manufacturing method thereof are provided to have excellent leakage current characteristic and high dielectric constant by alternately using titanium oxide and Al oxide. An organic-inorganic complex superlattice film comprises a substrate, a self-assembled monolayer and a metal oxide layer. The self-assembled monolayer is formed on the substrate with a method for molecular layer deposition. The metal oxide layer is formed on the self-assembled monolayer with a method for atomic layer deposition. The self-assembled monolayer and the metal oxide layer are successively and repeatedly formed. The metal oxide layer comprises one or more metals selected from a group consisting of the Al, Zr, Ti, Hf and Zn. The metal oxide layer is formed by selecting one combination among Ti:Al, Al:Zr, Zr:Hf, and Al:Hf.</p> |
