发明名称 Probing structure with fine pitch probes
摘要 A microelectronic resilient structure can comprise a support member and a platform attached to the support member. The platform can comprise a non-conductive, resilient beam that extends away from the support member, and a plurality of conductive members can be disposed on the beams. The conductive members can extend along a length of the beam. A plurality of conductive contact elements can be disposed on the beam and electrically connected to one of the conductive members.
申请公布号 US7583101(B2) 申请公布日期 2009.09.01
申请号 US20070624661 申请日期 2007.01.18
申请人 FORMFACTOR, INC. 发明人 MILLER CHARLES A.
分类号 G01R31/02 主分类号 G01R31/02
代理机构 代理人
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