| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor tester which reduces the effect of a high-voltage interrupt path in a logic pattern test, and has an improved waveform quality of a signal which is applied to a DUT. SOLUTION: The semiconductor tester comprises a driver 1 for applying a logic level signal to the DUT via a first switching means 2; a high-voltage driver 3 for applying a predetermined high-voltage level signal to the DUT via a second switching means 4; and a DC measuring unit 5 for applying a DC level signal to the DUT via a third switching means 7. The semiconductor tester is provided with a fourth switching means 14, connected between the DC measuring unit 5 and the third switching means 7, and the high-voltage driver 3 is connected at a connection point between the third switching means 7 and the fourth switch means 14 via the second switching means 4. COPYRIGHT: (C)2009,JPO&INPIT
|
