TEM WITH ABERRATION CORRECTOR AND PHASE PLATE

摘要

PROBLEM TO BE SOLVED: To provide a TEM with a corrector (330) to improve image quality and a phase plate (340) to improve contrast. SOLUTION: This improved TEM comprises a correction system completely placed between an objective system lens and the phase plate, and uses lenses of the corrector to form a magnified image of a diffraction plane on the phase plate. COPYRIGHT: (C)2009,JPO&INPIT