| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide silica-titania glass exhibiting a sufficiently controlled CTE, a method for exactly measuring the CTE of the silica-titania glass without limiting a sample size and a method for controlling the CTE of the silica-titania glass by a post-treatment. <P>SOLUTION: The silica-titania glass having a coefficient of thermal expansion CTE obtained by substituting the velocity of leakage surface acoustic waves V<SB>LSAW</SB>and a fictive temperature Tf for an equation (1) denoted as CTE=4.436×(V<SB>LSAW</SB>-3,308.95)+(1,068-Tf)/2.84 (1) (wherein, CTE is a coefficient of thermal expansion (ppb/K); V<SB>LSAW</SB>is the velocity of leakage surface acoustic waves (m/s); and Tf is a fictive temperature (°C)) of -50 ppb/K or more and 50 ppb/K or less at 22°C and having the range of the fictive temperature Tf denoted as 700(°C)≤Tf≤1,300(°C), is provided. <P>COPYRIGHT: (C)2009,JPO&INPIT |
