发明名称 GAS-HEATING DEVICE, SEMICONDUCTOR PROCESSING APPARATUS USING THE SAME, AND METHOD FOR MANUFACTURING GAS-HEATING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a gas-heating device which can be connected to a gas transport pipe in an in-line form, and can be miniaturized. SOLUTION: The gas-heating device has a heater embedded in a heat transfer block itself, and has a linear hollow heating path which is bent on the way and has a circular cross-section. A gas is introduced from a gas introduction port and swirls in the hollow heating path to be heated. Thereby, the gas-heating device can efficiently heat the swirling gas even if the distance of the hollow heating path is short, and besides, can reduce the size of the whole heat transfer block because the hollow heating path is bent on the way. As a result, the whole gas-heating device can be miniaturized, and the heating efficiency is improved. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009191283(A) 申请公布日期 2009.08.27
申请号 JP20080030159 申请日期 2008.02.12
申请人 SOKEN KOGYO KK 发明人 YOSHIDA AKIRA;TSUKADA KAZUO;UJIIE KAZUO;WATANUKI HIROSHI;YAHAGI TADASHI;HARITA KOICHI
分类号 C23C16/44;F24H3/00;F24H3/04;H01L21/31 主分类号 C23C16/44
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