发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
<p>A semiconductor device is provided with a first interlayer insulating film (101), and a plurality of first wirings (105) formed on the first interlayer insulating film (101). A gap section (112) is selectively formed between the adjacent wirings of the first wirings (105) on the first interlayer insulating film (101), and a gap insulating film (111) is formed between the wirings, above the gap section (112). The width of a lower end section and that of the upper end section of the gap section (112) are substantially the same as a distance between the gap section (112) and the adjacent wiring, and the position of the lower end section of the gap section (112) is lower than the position of the lower end section of the first wiring (105) adjacent to the gap section (112).</p> |
申请公布号 |
WO2009104233(A1) |
申请公布日期 |
2009.08.27 |
申请号 |
WO2008JP03788 |
申请日期 |
2008.12.16 |
申请人 |
PANASONIC CORPORATION;KOROGI, HAYATO;HARADA, TAKESHI;UEKI, AKIRA |
发明人 |
KOROGI, HAYATO;HARADA, TAKESHI;UEKI, AKIRA |
分类号 |
H01L21/768;H01L23/522 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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