发明名称 THIN FILM TRANSISTOR SUBSTRATE AND DISPLAY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a thin film transistor substrate which can eliminate a barrier metal from between wiring metals, such as, source electrode, drain electrode, and to provide a display device. SOLUTION: The thin film transistor substrate includes a semiconductor layer 1, a source electrode 2, a drain electrode 3, and a transparent electrode 4. The source electrode 2 and drain electrode 3 are made of an Al alloy film which contains Si and/or Ge:0.1-1.5 atom%, Ni and/or Co:0.1-3.0 atom%, and La and/or Nd:0.1-0.5 atom% and is directly connected to the semiconductor layer 1. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009194372(A) 申请公布日期 2009.08.27
申请号 JP20090003732 申请日期 2009.01.09
申请人 KOBE STEEL LTD 发明人 OCHI MOTOTAKA;KAWAKAMI NOBUYUKI;FUKU KATSUFUMI;GOTO YASUSHI
分类号 H01L29/786;C22C21/00;G02F1/1343;G02F1/1368;G09F9/30;H01L21/28;H01L21/285;H01L21/3205;H01L23/52;H01L29/417 主分类号 H01L29/786
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