| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor inspection device having a probe structure capable of increasing the number of pins and narrowing a pitch in the X-X direction and in the Y-Y direction. SOLUTION: This semiconductor inspection device having a contactor connected electrically to an electrode pad formed on a semiconductor device which is a measuring object, and a substrate provided with the contactor, has a characteristic wherein the contactor is provided obliquely with respect to the main surface of the substrate. COPYRIGHT: (C)2009,JPO&INPIT |
