| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an X-ray flat panel sensor of direct conversion type whose high-voltage wire fixing material is prevented from seeping into its X-ray conversion layer and the neighborhood of a power supply connection part of which exhibits a low contact resistance and a favorable manufacturing workability. <P>SOLUTION: The power supply connection part 4 in which the high-voltage wire 5 for supplying a high voltage to a bias electrode 1 is connected by the fixing material 6 is formed on the top surface of the bias electrode 1. The power supply connection part 4 is formed of a multilayer film and is composed of double-sided conductive tape as a base and a material preventing the fixing material 6 from seeping into the X-ray conversion layer 2, e.g. a copper thin film or a chrome thin film. Consequently, the contact resistance of the neighborhood of the power supply connection part 4 is low, its construction is simple, its manufacturing workability is favorable and the fixing material 6 never seeps into the X-ray conversion layer 2. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
