| 摘要 |
<p>Disclosed is a method for manufacturing a variable resistance element, wherein occurrence of corrosion can be reduced without raising the substrate temperature. Specifically, a multilayer film comprising a high-melting-point metal film and a metal oxide film is etched, while using a mask, in a plasma atmosphere which is formed by using at least one gasification compound selected from alcohols and hydrocarbons, or by using alternatively a mixed gas which is formed by adding at lease one gas selected from the group consisting of argon, helium, xenon, neon, krypton, oxygen, ozone, nitrogen, H2O, N2O, NO2, CO and CO2 to the gasification compound.</p> |
