| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor conveyor having an interlock system switchover mechanism for a robot remote teaching operation performed in maintaining the semiconductor conveyor in a safety and simple structure. SOLUTION: The semiconductor conveyor 1 conveys a semiconductor sample by a conveyance robot including: an aperture 10 for inspection and adjustment; a cover 2 capable of opening/closing to cover the aperture 10; and an interlock circuit 3 for activating the interlock 3 when the cover 2 is opened to stop driving the conveyor. It further has a key switch 4 operable when the cover 2 is opened. The key switch 4 selects a normal mode N and a maintenance mode M. The interlock 3 is effective in the normal mode N, and ineffective in the maintenance mode M. Further, such a structure that use of a teaching pendant 5 for remote teaching to control the conveyance position of the conveyance robot is effective, is provided. COPYRIGHT: (C)2009,JPO&INPIT
|
