发明名称 |
Manufacturing resistors with tightened resistivity distribution in semiconductor integrated circuits |
摘要 |
An anneal recipe is provided to tighten the distribution of resistance values in the manufacture of semiconductor integrated circuits. An adjusted amount of dopant is implanted to compensate for a shift in the distribution of resistance values associated with the anneal recipe. The distribution tightening can be effectuated by including an ammonia gas flow in the anneal recipe. |
申请公布号 |
US8679936(B1) |
申请公布日期 |
2014.03.25 |
申请号 |
US20050138031 |
申请日期 |
2005.05.26 |
申请人 |
BUDRI THANAS;ROCK JERALD M.;SUPCZAK RANDY;NATIONAL SEMICONDUCTOR CORPORATION |
发明人 |
BUDRI THANAS;ROCK JERALD M.;SUPCZAK RANDY |
分类号 |
H01L21/20 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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