| 摘要 |
There is provided a fluid controlling apparatus which can satisfactorily perform heating without enlarging an installation area. Heating means 3 comprises: a planar heater 21 interposed between a base member 2 and a lower layer 5; and heat conduction enhancing spacers 22 interposed between interrupting releasers 15 and 17 disposed on an upper layer 4 and a mass flow controller 16, and the heater 21, respectively.
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