MEMORY DEVICE USING CARBON NANOTUBES ATTACHED NANOPARTICLES THERETO AND METHOD OF FABRICATING THE SAME
摘要
<p>Provided are a memory device using carbon nanotubes (CNTs) and a method of fabricating the same. The memory device includes a substrate, a first electrode formed on the substrate, a charge trapping layer formed on the first electrode and comprised of carbon nanotubes (CNTs) to which nanoparticles are attached, and a second electrode formed on the charge trapping layer. The memory device is a new device which uses a structure in which the nanoparticles are attached to the surface of the CNTs to store a state.</p>