发明名称 WASTE LIQUID PROCESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a waste liquid processing device enabling a whole device to be compactly configured. SOLUTION: The waste liquid processing device is provided with a waste liquid storage tank, a waste liquid filtration means, a fresh water tank, a pure water generation means, a pure water temperature adjusting means, a control means, an operation board, and a device housing for storing each configuring means. The device housing is provided with a bottom wall, an upper wall, a left side wall, a right side wall, a rear wall, and an opening/closing door for opening/closing an opening at the front side. The waste liquid tank is arranged on the rear wall side at the bottom wall. The pure water tank is arranged adjacent to the waste liquid tank and at the center of the bottom wall. The pure water generation means is arranged adjacent to the pure water tank and on the opening side on the front side of the bottom wall. The waste water filtration means is arranged on the upper side of the pure water generation means. The pure water temperature adjusting means is arranged above the waste liquid tank. The control means and the operation board are arranged on the upper side of the waste liquid filtration means and the operation board is arranged on the front side of the device housing. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009190128(A) 申请公布日期 2009.08.27
申请号 JP20080034084 申请日期 2008.02.15
申请人 DISCO ABRASIVE SYST LTD 发明人 FURONAKA TAKESHI;YOSHIDA MIKI
分类号 B23Q11/10;B23Q11/00;H01L21/301 主分类号 B23Q11/10
代理机构 代理人
主权项
地址