| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic actuator or the like capable of obtaining larger displacement of an oscillating board at lower voltage in spite of simple constitution. SOLUTION: The electrostatic actuator is equipped with the oscillating board 4 which can be deformed and becomes an electrode, a first counter electrode 11 which is disposed to be opposed to the oscillating board 4 through a predetermined gap 10, a piezoelectric film 101 which is formed at a part of the surface of the oscillating board 4 on an opposite side to the first counter electrode 11, and a second counter electrode 102 which is formed on the surface of the piezoelectric film 101. COPYRIGHT: (C)2009,JPO&INPIT
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