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发明名称
COMPONENT MOUNTING IN MOVEMENT-SENSITIVE EQUIPMENT
摘要
申请公布号
EP2092546(A2)
申请公布日期
2009.08.26
申请号
EP20070824511
申请日期
2007.11.08
申请人
VISTEC LITHOGRAPHY INC.
发明人
HARRIS, PAUL GEORGE
分类号
H01J37/317
主分类号
H01J37/317
代理机构
代理人
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地址
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