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发明名称
CVD-REAKTOR MIT GASAUSLASSRING AUS MASSIVEM GRAFIT
摘要
申请公布号
DE50114978(D1)
申请公布日期
2009.08.20
申请号
DE20015014978
申请日期
2001.08.01
申请人
AIXTRON AG
发明人
JUERGENSEN, HOLGER;STRAUCH, GERD;KAEPPELER, JOHANNES
分类号
C23C16/44;C23C16/455;C30B25/14;H01L21/205
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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