发明名称 DROPLET DISCHARGE DEVICE AND THIN FILM FORMING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a droplet discharge device capable of forming a uniform thin film while suppressing variation in droplet discharge quantity due to the change of a discharge pattern. SOLUTION: The droplet discharge device IJ is provided with: a droplet discharge head 5 having a plurality of nozzles and a driving device PZ provided corresponding to each nozzle; and a drive waveform storing means 100 for storing waveform data of a drive signal supplied to each drive device PZ. The drive voltage, the drive frequency or the drive waveform of the drive signal is set corresponding to the discharge pattern which is a combination of the use nozzle and the nonuse nozzle in the droplet discharge head 5 and the drive waveform storing means 100 stores the drive voltage, the drive frequency or the waveform data corresponding to the discharge pattern in every discharge pattern. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009183859(A) 申请公布日期 2009.08.20
申请号 JP20080026015 申请日期 2008.02.06
申请人 SEIKO EPSON CORP 发明人 ITO GOJI;KOMORI SADAJI;HIRUMA TAKASHI;KATAUE SATORU;IMAI TAKAHIRO;IGARASHI TORU
分类号 B05C5/00;B05C11/10;B05D1/26;B41J2/015 主分类号 B05C5/00
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