| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate storing container that prevents components from being damaged without allowing a substrate and container body to be worn to generate dust, even if carried at high speed. SOLUTION: The substrate storing container includes: a container body 1 for accommodating in alignment required sheets of the substrate comprised of a semiconductor wafer; a lid body 10 which is removably attached to the container body 1 to open and close a front portion open thereto; and a carrying flange 20 which is coiled to be attached to a ceiling portion of the container body 1 as a separate component part, so that the flange 20 is coiled to be attached to the ceiling portion of the container body 1 through a plurality of rubber vibration insulators 30. Since the rubber vibration insulators 30 are interposed between the ceiling of the container body 1 and the flange 20, vibration and shock are effectively absorbed and reduced even if the substrate storing container is carried at high speed and acceleration greater than the conventional one is applied. COPYRIGHT: (C)2009,JPO&INPIT |
