| 摘要 |
PROBLEM TO BE SOLVED: To provide a focused ion beam device with a simpler structure and its operation method. SOLUTION: The focused ion beam device includes an ion beam column including a case for housing a gas electric field ion source emitter with an emitter area for generating ions, an electrode for extracting ions from the gas electric field ion source emitter, one or more gas inlets adapted to introduce a first gas and a second gas to the emitter area, an objective lens for focusing the ion beam generated from the first gas or the second gas, a voltage supply for supplying a voltage between the electrode and the gas electric field ion source emitter, and a controller for switching between a first voltage and a second voltage of the voltage supply for generating an ion beam of ions of the first gas or an ion beam of ions of the second gas. COPYRIGHT: (C)2009,JPO&INPIT
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