| 摘要 |
PROBLEM TO BE SOLVED: To provide a chip-releasing device, a chip-releasing method, and a chip-pickup device capable of surely and efficiently releasing a thin chip from a sheet, without damaging the chip. SOLUTION: A chip releasing accelerating mechanism 7 accelerating releasing of a chip 6 from a sheet 5 is equipped with a first lifting/lowering member 23 that projects from a suction surface 22a that chucks the bottom surface of the sheet 5; a second lifting/lowering member 24 that projects from the top surface of the first lifting/lowering member 23, and a third lifting/lowering member 25, that projects from the top surface of the second lifting/lowering member 24 are comprised; and while their relative lifting/lowering operations are performed in lifting/lowering patterns that combine these lifting/lowering members in a predetermined lifting/lowering order, the sheet 5 is chucked under vacuum from a suction hole 22b and a suction opening 23c so as to be bent downward; and thus the chip 6 and the sheet 5 are released from each other at an out edge part of the chip 6 as a start point for releasing. COPYRIGHT: (C)2009,JPO&INPIT |
