Lens i.e. plane-convex lens, for use in microlithographic projection exposure system to manufacture e.g. LCD, has two lens elements with non-birefringent, non-amorphous material and birefringent material, respectively

摘要

The lens (200) has a lens element (210) with a non-birefringent, non-amorphous material, and another lens element (220) with a birefringent material. The lens element (220) comprises a coplanar subcomponent (221) i.e. monocrystal, which comprises a cubic crystal structure. The non-birefringent material and/or the birefringent material comprise a same or different chemical composition. The non-birefringent material and/or the birefringent material comprise a refractive index, and the lens element comprises a non-coplanar geometry. The lens element (220) coplanar and non-coplanar geometries. An independent claim is also included for a method for microlithographic manufacturing of microstructured components.