发明名称 METHOD OF EVALUATING MICROELEMENT
摘要 PROBLEM TO BE SOLVED: To provide a method of evaluating a microelement which enables precise evaluation of the characteristic without damaging the microelement upon evaluating a resistance characteristic, etc., of a microelement such as magnetoresistance effect element damageable to a flow of microcurrent. SOLUTION: The method of applying current to the microelement 10 having conductivity to evaluate the characteristics of the microelement 10 includes: a step of coating the microelement 10 with a resist 14; and a step of applying current to the microelement 10 coated with the resist 14 to evaluate the characteristics of the microelement 10. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009188043(A) 申请公布日期 2009.08.20
申请号 JP20080024120 申请日期 2008.02.04
申请人 FUJITSU LTD 发明人 CHIKASAWA TETSUSHI
分类号 H01L21/66;G01N27/00;G11B5/39;H01L43/08;H01L43/12 主分类号 H01L21/66
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