METHOD FOR ARRANGING NANOSTRUCTURES AND MANUFACTURING NANO DEVICES USING THE SAME
摘要
Disclosed is a method for arranging nanostructures and a method for fabricating a nano device. The method for arranging nanostructures in a certain direction includes: forming a sacrificial structure having a face in the certain direction on a substrate; forming the nanostructures at least on the face of the certain direction of the sacrificial structure; and removing the sacrificial structure.
申请公布号
WO2009066968(A3)
申请公布日期
2009.08.20
申请号
WO2008KR06927
申请日期
2008.11.24
申请人
SEOUL NATIONAL UNIVERSITY INDUSTRY FOUNDATION;HONG, SEUNG-HUN;LEE, BYUNG-YANG