| 摘要 |
PROBLEM TO BE SOLVED: To reduce defaults such as malfunctioning and fluctuation in device characteristics by decreasing deformation of a cover part for covering a cavity part, in a functional device provided with the cavity part storing a functional structures. SOLUTION: The functional device includes: a substrate 11; the functional structures 13A, 15A formed on the substrate; the cavity part C in which the functional structures are disposed; and the cover part D (19A, 22) which covers the cavity part. The cover part D (19A, 22) includes an irregular structure including a rib shaped part 19b or a groove shaped part 19c which cross a covering range 20C covering at least the cavity part. COPYRIGHT: (C)2009,JPO&INPIT
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