发明名称 ETCHANT
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a nickel etchant which can suppress the corrosion of metal other than nickel, particularly that of copper. <P>SOLUTION: The etchant contains: nitric acid or sulfuric acid; hydrogen peroxide; and water, wherein the etchant has a composition containing a polymer having a repeated unit selected from formula (I) and formula (III). <P>COPYRIGHT: (C)2009,JPO&INPIT</p>
申请公布号 JP2009185377(A) 申请公布日期 2009.08.20
申请号 JP20080262945 申请日期 2008.10.09
申请人 MEC KK 发明人 KATAYAMA DAISUKE;KURII MASAYO
分类号 C23F1/28;C23F1/44;H01L21/308;H05K3/06 主分类号 C23F1/28
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