DIMENSION MEASURING DEVICE AND METHOD

摘要

PROBLEM TO BE SOLVED: To provide a dimension measuring device and a dimension measuring method capable of accurately detecting a peak position of interference fringe and precisely measuring a dimension in dimension measurement using white interference. SOLUTION: The dimension measuring device 1 includes a first interferometer 3 diverging light from a white light source 2 into a first luminous flux and a second luminous flux and causing a first optical path difference corresponding to a measured object dimension of a measured object between the two luminous fluxes; a second interferometer 4 diverging the luminous flux emitted from the first interferometer 3 into a third luminous flux and a fourth luminous flux and causing a second optical path difference between the two luminous fluxes; a detector 5b receiving the third and fourth luminous fluxes and detecting an interference signal; a phase shift signal-generating sections 44, 5a generating an interference signal having a phase different by 90 degrees from that of the interference signal; and a controller 6 calculating a Lissajous waveform based on the two interference signals, obtaining the peak position of interference fringe corresponding to the measured object from the maximum value, and obtaining a measured object dimension from the second optical path difference corresponding to the peak position. COPYRIGHT: (C)2009,JPO&INPIT