| 摘要 |
PROBLEM TO BE SOLVED: To provide a system and a method of analyzing a semiconductor manufacturing process, capable of efficiently analyzing a cause of degradation of productivity, in a semiconductor manufacturing process. SOLUTION: The system of analyzing the semiconductor manufacturing process includes: a first storage part for storing layout information, exhibiting an arrangement of a plurality of semiconductor manufacturing devices; a second storage part for storing an estimated processing value of each semiconductor manufacturing device; a third storage part for storing an actual processing value for each semiconductor manufacturing device; a calculation part for calculating processing performance of each semiconductor manufacturing device from the estimated processing value and the actual processing value; and a display control part for displaying, based on the layout information, a figure exhibiting the arrangement of the plurality of semiconductor manufacturing devices and the processing performance arranged corresponding to each device. COPYRIGHT: (C)2009,JPO&INPIT
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