发明名称 |
PROBE UNIT AND INSPECTION APPARATUS |
摘要 |
A probe unit and an inspection apparatus are provided to maintain test accuracy high by matching suitable impedance according to a test device and the probe unit. In a probe unit and an inspection apparatus, a probe assembly(24) receives a testing signal while being contacted with a testing board. A connection cable(25) connects the probe unit and an external device electrically while having an FPC cable transmitting the electrical signal according to the rest. The FPC cable includes a plurality of signal transmitting a testing signal and an FPC board in which a signal line is formed in one side. |
申请公布号 |
KR20090088784(A) |
申请公布日期 |
2009.08.20 |
申请号 |
KR20080122848 |
申请日期 |
2008.12.05 |
申请人 |
KABUSHIKI KAISHA NIHON MICRONICS |
发明人 |
NARAOKA SYUJI;YAMAUCHI KAZUHIRO |
分类号 |
G01R1/06 |
主分类号 |
G01R1/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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