DEVICE MANUFACTURING PROCESS UTILIZING A DOUBLE PATTERING PROCESS,申请号EP20070862481-传众专利搜索

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发明名称	DEVICE MANUFACTURING PROCESS UTILIZING A DOUBLE PATTERING PROCESS
摘要
申请公布号	EP2089774(A2)	申请公布日期	2009.08.19
申请号	EP20070862481	申请日期	2007.12.04
申请人	FUJIFILM ELECTRONIC MATERIALS USA, INC.	发明人	BRZOZOWY, DAVE;SARUBBI, THOMAS R.;MALIK, SANJAY;SPAZIANO, GREGORY
分类号	G03F7/20	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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