发明名称 A SEMICONDUCTOR DEVICE AND A METHOD OF MANUFACTURING THE SAME
摘要 A semiconductor device and a manufacturing method thereof are provided to precisely arrange a position of a mounting substrate and a semiconductor chip by improving visibility of an alignment mark. A region for forming an alignment mark forms an alignment mark used in a position decision in mounting a semiconductor chip on a mounting substrate(1S). An integrated circuit is formed on a region for forming an integrated circuit. The alignment mark includes a mark region which forms a mark and a background region which surrounds the mark region. An isolation region(STI) and lines(GR1,GR2,GR3) are formed on the region for forming the integrated circuit. A first pattern(P1a,P1b) is formed in a bottom layer of the background region of the alignment mark.
申请公布号 KR20090088340(A) 申请公布日期 2009.08.19
申请号 KR20090012122 申请日期 2009.02.13
申请人 RENESAS TECHNOLOGY CORP. 发明人 KOKETSU MASAMI;SAWADA TOSHIAKI
分类号 H01L23/544;H01L21/00 主分类号 H01L23/544
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