Method of measuring front and back surfaces of target object

摘要

A method of measuring a front surface profile and a back surface profile of a target object (71) includes: mounting the target object (71) in such a posture that a first measuring surface (front surface) (73) is measurable by a probe (8); first measuring a contour of the target object (71); measuring the first measuring surface (73) of the target object (71); reversing the target object (71); second measuring the contour of the target object (71) with the reversed posture of the target object (71) being maintained; obtaining a measurement position of a second measuring surface (74) by comparison of contour data obtained through the first and second measuring of the contour, the measurement position of the second measuring surface (74) corresponding to a measurement position of the first measuring surface (73) at which the measuring of the first measuring surface (73) is conducted; and measuring a profile of the second measuring surface (74) along the obtained measurement position of the second measuring surface (74).