| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate lamination method capable of improving lamination accuracy and preventing inclusion of air without increasing equipment cost and time cost. SOLUTION: The substrate lamination method for laminating a first substrate (K1) having flexibility and a second substrate (K2) having flexibility or no flexibility includes: disposition steps (S1, S2, S3) of disposing the first substrate (K1) and the second substrate (K2) with the respective lamination faces (K11, K21) opposing to and close to each other; a first pressurizing step (S4) of pressurizing an approximate center line (J1) and proximity regions (R1) in both sides of the center line on the lamination face (K11) of the first substrate (K1) toward the lamination face (K21) of the second substrate (K2); and a second pressurizing step (S5) of pressurizing the first substrate (K1) while gradually spreading the pressurizing region in a direction (X) perpendicular to the approximate center line (J1). COPYRIGHT: (C)2009,JPO&INPIT
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