| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a new compound producing a resist achieving high sensitivity and high transparency in the case of using it as a photoacid generator in a resist composition. <P>SOLUTION: This aryl-substituted benzyl cyanide-based oximesulfonate compound is expressed by formula [1] [wherein, R<SP>1</SP>is a substituted or a non-substituted aryl; R<SP>2</SP>is H, a halogen atom, CN, NO<SB>2</SB>, a 1-10C alkyl or alkoxy, or a 1-5C haloalkyl or haloalkoxy; R<SP>3</SP>is a 1-10C alkyl or alkoxy, a 1-5C haloalkyl or haloalkoxy, or phenyl, naphthyl or anthranyl, which may be substituted by W; and the W is a halogen atom, CN, NO<SB>2</SB>, a 1-10C alkyl or alkoxy, or a 1-5C haloalkyl or haloalkoxy]. <P>COPYRIGHT: (C)2009,JPO&INPIT |
