| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To adjust the air volume supplied from a fan filter unit even when the fan filter unit is incorporated in a manufacturing device and the like by switching an adjustment width of rotational frequency of the fan filter unit. <P>SOLUTION: The adjustment width of rotational frequency of the fan motor unit 3 can be switched by disposing a setting portion 7 capable of adjusting the width of rotational frequency of the fan motor unit 3 at a suction opening side of a chamber 4, so that the adjustment width can be switched by the setting portion 7 even when the adjustment of the rotational frequency is needed in incorporating the fan filter unit in the manufacturing device. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
