| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for controlling a charger of a high-voltage power supply for a pulse laser which can easily control an output of the charger. SOLUTION: A control part provided in the charger multiplies a correction parameter of a correction parameter table corresponding to a condition setting by an output voltage setting value obtained by setting a condition to acquire an output voltage correction value, and then controls the output of the charger based on the acquired output voltage correction value and an input line voltage value obtained by setting a condition. COPYRIGHT: (C)2009,JPO&INPIT |
