发明名称 |
TECHNIQUES FOR COLD IMPLANTATION OF CARBON-CONTAINING SPECIES |
摘要 |
Techniques for cold implantation of carbon-containing species are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation including a cooling device for cooling a target material to a predetermined temperature, and an ion implanter for implanting the target material with a carbon-containing species at the predetermined temperature to improve at least one of strain and amorphization.
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申请公布号 |
US2009200494(A1) |
申请公布日期 |
2009.08.13 |
申请号 |
US20080059437 |
申请日期 |
2008.03.31 |
申请人 |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. |
发明人 |
HATEM CHRISTOPHER R.;RENAU ANTHONY;DICKERSON GARY E. |
分类号 |
H01J37/08 |
主分类号 |
H01J37/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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