发明名称 |
Dimensional stabilization of precision etched masks |
摘要 |
Dimensional stabilization of a precision etched mask used in the production of organic light emitting diode display panels. This may entail securing a sheet of mask material, and then heating the sheet of mask material to a temperature within a predetermined range for a predetermined amount of time to produce a treated sheet of mask material. The treated sheet of mask material may then be used to fabricate a dimensionally stable precision etched mask, such as by exposing and etching the treated sheet of mask material.
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申请公布号 |
US2009202922(A1) |
申请公布日期 |
2009.08.13 |
申请号 |
US20080216047 |
申请日期 |
2008.06.27 |
申请人 |
SONY CORPORATION;SONY ELECTRONICS INC. |
发明人 |
HARKLEROAD GARY L.;VACCARO ROBERT |
分类号 |
G03F1/00 |
主分类号 |
G03F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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