| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma gun capable of suitably preventing plasma damage on a sealing member of an insulating body for insulating an electrode. <P>SOLUTION: The plasma gun 100 comprises a cathode unit 1 capable of forming plasma, a plate-shaped first electrode 2 forming a first through-hole 42 which can pull out plasma; a plate-shaped second electrode 3 forming a second through-hole 43 putting an axis, together with the center axis 201 of the through-hole 42 and lined up with the first electrode 2 on the center axis 201; a circular insulating body 51, arranged in between the first electrode 2 and the second electrode 3 and formed to make a space zone 101 between the first electrode 2 and the second electrode 3 airtight; and a conductive cylindrical body 25 arranged on the first through-hole 42 or the second through-hole 43. The cylindrical body 25 extends along the center axis 201 so as to straddle the space zone 101. <P>COPYRIGHT: (C)2009,JPO&INPIT |
