| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a process for producing a display for effectively preventing corrosion of an Al based alloy film by hardly generating corrosion in an alkali liquid such as a TMAH aqueous solution in the display provided with a structure directly connecting an Al alloy film for a reflective electrode on an oxide transparent conductive film. <P>SOLUTION: The process for producing the display 11 provided with the structure directly connecting the Al alloy film 19b for the reflective electrode on the oxide transparent conductive film 19a includes: a first step for forming the oxide transparent conductive film on a substrate; a second step for forming the Al alloy film on the oxide transparent conductive film; and a third step for heating the Al alloy film. The Al alloy film comprises an Al-(Ni/Co)-X alloy containing at least one element selected from Ni and/or Co in 0.1-4 atom%, La, Mg and the like in a range of 0.1-2 atom% in the total amount, and controls the temperature of the substrate in the second process and a heating temperature in the third process, according to the content of Ni and/or Co. <P>COPYRIGHT: (C)2009,JPO&INPIT |
