发明名称 EVALUATING METHOD FOR SAMPLING INSPECTION, AND EVALUATING DEVICE FOR SAMPLING INSPECTION
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a method and a device that accurately evaluate sampling inspection even when the premise of random sampling and the premise of a normal population are not satisfied. <P>SOLUTION: The first sampling plan of an object to be inspected and the calculation condition of a first acceptance value are determined, a first measured value is acquired on the basis of the determined sampling plan, and the first acceptance value, a first distribution function and a first pass rate are calculated on the basis of the acquired first measured value and the determined calculation condition of the first acceptance value. The second sampling plan of the object to be inspected and the calculation condition of a second acceptance value are determined, a second measured value is acquired on the basis of the determined second sampling plan, and a second distribution function and a second pass rate are calculated on the basis of the acquired measured value and the determined calculation condition of the second acceptance value. A determined acceptable range is used and the first distribution function and first pass rate, and second distribution function and second pass rate are compared with one another to evaluate the first sampling plan and second sampling plan. <P>COPYRIGHT: (C)2009,JPO&INPIT</p>
申请公布号 JP2009176909(A) 申请公布日期 2009.08.06
申请号 JP20080013360 申请日期 2008.01.24
申请人 TOSHIBA CORP 发明人 IKEDA TAKAHIRO;ASANO MASASHI
分类号 H01L21/66;G01R31/28 主分类号 H01L21/66
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